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发表人:m_xiang 发表时间:2019-1-31 16:59:00  

 

 本栏论题: 金刚石热控制提高InAlGaN晶体管输出功率  [498]

    日本富士通研究所近期报道了在金刚石热控制的基础上,适用于碳化硅(SiC)上~3GHz InAlGaN高电子迁移率晶体管(HEMT)[Toshihiro Ohki et al, IEEE Electron Device Letters, published online 5 December 2018]。其中热管理是实现更高功率密度的关键步骤。 金刚石是一种具有非常高导热性的材料。
   
    该团队称:“该带有SiC /金刚石粘合散热器的InAlGaN / GaN HEMT,实现了22.3W / mm的高输出功率密度。这是目前GaN HEMT中最高的输出功率密度,在该款HEMT中的S波段具有添加了铟的阻挡层。“
   
    研究人员发现基于GaN通道中电子流的高电压和高频能力,在微波高功率放大器中有很好的应用。在保证不失真的强信号传输中,需要具有高功率密度;在雷达系统中,高功率扩展了其检测范围。
   
    因此在本研究中使用金属有机气相外延(MOVPE)在碳化硅上生长器件材料。其形成的异质结构特征在于InGaN背势垒,旨在减少漏极电流泄漏。顶部InAlGaN顶部势垒在AlGaN间隔物上生长,以努力减小界面粗糙度以改善GaN沟道中的电子迁移率。
   
    在顶部阻挡材料中包括铟允许减小沟道中的薄层电阻而不增加结构中的拉伸应变,这是AlGaN顶部阻挡层不可避免的。富士通团队报告称,之前使用InAlGaN阻挡层实现了比W波段(75-110GHz)中的AlGaN / GaN HEMT更高的输出密度。
   
    W波段频率分配用于卫星通信,毫米波雷达研究,军用雷达目标和跟踪以及汽车巡航控制雷达。S波段(2-4GHz)应用还包括雷达,以及许多本地无线通信设备(WiFi,蓝牙等)。
   
    源极/漏极接触由再生长的n+ -GaN和钛/金电极组成。肖特基门是镍/金。 在将SiC生长衬底减薄至50μm并用化学机械抛光平滑后,将该器件粘合到金刚石上。
   
    通过用氩气束处理制备粘合表面以除去污染物并活化粘合表面,使SiC和金刚石之间的界面更具导热性。金刚石表面还包含在氩气暴露之前施加的薄金属层。
   
    研究人员称:“这一过程使金刚石表面形成的低密度损伤层受到抑制,因此大大提高了SiC与金刚石基板之间的结合强度。”
   
    通过光学显微镜检查粘合剂未发现任何空隙。利用机械来剥离器件与金刚石材料是困难的。这些特征均表明其之间具有低热阻的强键合。来源:OFweek新材料网
   
    0.25μmx50μm栅极的HEMT实现了1058mA / mm的最大漏极电流和488mS / mm的峰值跨导。夹断时的三端硬击穿电压为257V。研究人员认为,高击穿电压是InAlGaN阻挡层高生长温度的结果,其晶体质量高于InAlN阻挡层。研究人员还说,击穿强度与用相同方式制造的AlGaN / GaN HEMT所达到的击穿强度相当。
   
    研究人员还用红外相机评估了该HEMT的热性能。在金刚石散热器上,器件温度达到120°C,输入功率为12W。而如果没有金刚石进行热控制,它只需要4W就能超过120°C。对于金刚石-HEMT,100°C左右的热阻为7.2°C / W,但如果没有散热器则会增加到18.8°C / W。
   
    在3GHz附近的S波段进行微波负载牵引测量,结果表明饱和输出功率为19.8W / mm,金刚石总栅极宽度为1mm,占空比为10μs,脉冲为10μs。没有金刚石进行热控制管理,则功率仅达到14.8W / mm。占空比为1%时,金刚石的功率增加到22.3W / mm。
   
    研究人员指出,他们的工作受到测量设备最大电压的限制,更高的漏极偏压(超过100V)可以产生更好的结果。 然而,对于金刚石-HEMT,10%占空比脉冲出现了显著的热降解现象,在雷达和无线通信设备中,10%的占空比是很常见的。
   
    由于该器件目前没有使用先进的场控制结构,该团队希望后续可以对栅极和漏极之间的电位进行调制,并降低栅极边缘处电场的大小。据预测,未来的性能指标会包括迄今为止通过S波段AlGaN / GaN HEMT实现的40W / mm功率密度。

以下是关于《金刚石热控制提高InAlGaN晶体管输出功率》论题的回复(共1篇)

回复人:lehehe 

 回复时间:2019-6-25 18:54:00

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